Name:
Hexamethyldisilazane
Synonym:
Bis(trimethylsilyl)amine; HMDS; 1,1,1-Trimethyl-N-(trimethylsilyl)silanamine
CAS:
999-97-3
Section 1 - Chemical Product
MSDS Name:Hexamethyldisilazane
Synonym:Bis(trimethylsilyl)amine; HMDS; 1,1,1-Trimethyl-N-(trimethylsilyl)silanamine
Synonym:Bis(trimethylsilyl)amine; HMDS; 1,1,1-Trimethyl-N-(trimethylsilyl)silanamine
Section 2 - COMPOSITION, INFORMATION ON INGREDIENTS
| CAS# | Chemical Name | emsds | EINECS# |
| 999-97-3 | Hexamethyldisilizane | 100 % | 213-668-5 |
| Hazard Symbols: XI F Risk Phrases: 11 36/37/38 |
Section 3 - HAZARDS IDENTIFICATION
EMERGENCY OVERVIEW
Highly flammable. Irritating to eyes, respiratory system and skin.Moisture sensitive.Corrosive.
Potential Health Effects
Eye:
Causes eye burns.
Skin:
Harmful if absorbed through the skin. Causes skin burns.
Ingestion:
May cause severe gastrointestinal tract irritation with nausea, vomiting and possible burns. May be harmful if swallowed.
Inhalation:
May cause irritation of the respiratory tract with burning pain in the nose and throat, coughing, wheezing, shortness of breath and pulmonary edema. Inhalation may be fatal as a result of spasm, inflammation, edema of the larynx and bronchi, chemical pneumonitis and pulmonary edema.
Chronic:
No information found.
Highly flammable. Irritating to eyes, respiratory system and skin.Moisture sensitive.Corrosive.
Potential Health Effects
Eye:
Causes eye burns.
Skin:
Harmful if absorbed through the skin. Causes skin burns.
Ingestion:
May cause severe gastrointestinal tract irritation with nausea, vomiting and possible burns. May be harmful if swallowed.
Inhalation:
May cause irritation of the respiratory tract with burning pain in the nose and throat, coughing, wheezing, shortness of breath and pulmonary edema. Inhalation may be fatal as a result of spasm, inflammation, edema of the larynx and bronchi, chemical pneumonitis and pulmonary edema.
Chronic:
No information found.
Section 4 - FIRST AID MEASURES
Eyes: Immediately flush eyes with plenty of water for at least 15 minutes, occasionally lifting the upper and lower eyelids. Get medical aid immediately.
Skin:
Get medical aid. Immediately flush skin with plenty of water for at least 15 minutes while removing contaminated clothing and shoes.
Wash clothing before reuse.
Ingestion:
Do not induce vomiting. If victim is conscious and alert, give 2-4 cupfuls of milk or water. Never give anything by mouth to an unconscious person. Get medical aid immediately.
Inhalation:
Get medical aid immediately. Remove from exposure and move to fresh air immediately. If not breathing, give artificial respiration. If breathing is difficult, give oxygen.
Notes to Physician:
Treat symptomatically and supportively.
Skin:
Get medical aid. Immediately flush skin with plenty of water for at least 15 minutes while removing contaminated clothing and shoes.
Wash clothing before reuse.
Ingestion:
Do not induce vomiting. If victim is conscious and alert, give 2-4 cupfuls of milk or water. Never give anything by mouth to an unconscious person. Get medical aid immediately.
Inhalation:
Get medical aid immediately. Remove from exposure and move to fresh air immediately. If not breathing, give artificial respiration. If breathing is difficult, give oxygen.
Notes to Physician:
Treat symptomatically and supportively.
Section 5 - FIRE FIGHTING MEASURES
General Information:
As in any fire, wear a self-contained breathing apparatus in pressure-demand, MSHA/NIOSH (approved or equivalent), and full protective gear. Vapors can travel to a source of ignition and flash back. Flammable liquid and vapor.
Extinguishing Media:
Do NOT use water directly on fire. Use foam, dry chemical, or carbon dioxide.
As in any fire, wear a self-contained breathing apparatus in pressure-demand, MSHA/NIOSH (approved or equivalent), and full protective gear. Vapors can travel to a source of ignition and flash back. Flammable liquid and vapor.
Extinguishing Media:
Do NOT use water directly on fire. Use foam, dry chemical, or carbon dioxide.
Section 6 - ACCIDENTAL RELEASE MEASURES
General Information: Use proper personal protective equipment as indicated in Section 8.
Spills/Leaks:
Absorb spill with inert material (e.g. vermiculite, sand or earth), then place in suitable container. Clean up spills immediately, observing precautions in the Protective Equipment section. Scoop up with a nonsparking tool, then place into a suitable container for disposal. Remove all sources of ignition.
Spills/Leaks:
Absorb spill with inert material (e.g. vermiculite, sand or earth), then place in suitable container. Clean up spills immediately, observing precautions in the Protective Equipment section. Scoop up with a nonsparking tool, then place into a suitable container for disposal. Remove all sources of ignition.
Section 7 - HANDLING and STORAGE
Handling:
Wash thoroughly after handling. Remove contaminated clothing and wash before reuse. Use only in a well-ventilated area. Use spark-proof tools and explosion proof equipment. Avoid breathing dust, vapor, mist, or gas. Do not get in eyes, on skin, or on clothing. Empty containers retain product residue, (liquid and/or vapor), and can be dangerous. Take precautionary measures against static discharges. Keep away from heat, sparks and flame. Do not ingest or inhale. Use only in a chemical fume hood. Do not pressurize, cut, weld, braze, solder, drill, grind, or expose empty containers to heat, sparks or open flames.
Storage:
Keep away from heat, sparks, and flame. Keep away from sources of ignition. Store in a cool, dry place. Keep container closed when not in use. Store in a tightly closed container. Flammables-area.
Wash thoroughly after handling. Remove contaminated clothing and wash before reuse. Use only in a well-ventilated area. Use spark-proof tools and explosion proof equipment. Avoid breathing dust, vapor, mist, or gas. Do not get in eyes, on skin, or on clothing. Empty containers retain product residue, (liquid and/or vapor), and can be dangerous. Take precautionary measures against static discharges. Keep away from heat, sparks and flame. Do not ingest or inhale. Use only in a chemical fume hood. Do not pressurize, cut, weld, braze, solder, drill, grind, or expose empty containers to heat, sparks or open flames.
Storage:
Keep away from heat, sparks, and flame. Keep away from sources of ignition. Store in a cool, dry place. Keep container closed when not in use. Store in a tightly closed container. Flammables-area.
Section 8 - EXPOSURE CONTROLS, PERSONAL PROTECTION
Engineering Controls:
Use process enclosure, local exhaust ventilation, or other engineering controls to control airborne levels below recommended exposure limits.
Exposure Limits CAS# 999-97-3: Russia: 2 mg/m3 TWA Personal Protective Equipment Eyes: Wear appropriate protective eyeglasses or chemical safety goggles as described by OSHAs eye and face protection regulations in 29 CFR 1910.133 or European Standard EN166.
Skin:
Wear appropriate protective gloves to prevent skin exposure.
Clothing:
Wear appropriate protective clothing to prevent skin exposure.
Respirators:
Follow the OSHA respirator regulations found in 29 CFR 1910.134 or European Standard EN 149. Use a NIOSH/MSHA or European Standard EN 149 approved respirator if exposure limits are exceeded or if irritation or other symptoms are experienced.
Use process enclosure, local exhaust ventilation, or other engineering controls to control airborne levels below recommended exposure limits.
Exposure Limits CAS# 999-97-3: Russia: 2 mg/m3 TWA Personal Protective Equipment Eyes: Wear appropriate protective eyeglasses or chemical safety goggles as described by OSHAs eye and face protection regulations in 29 CFR 1910.133 or European Standard EN166.
Skin:
Wear appropriate protective gloves to prevent skin exposure.
Clothing:
Wear appropriate protective clothing to prevent skin exposure.
Respirators:
Follow the OSHA respirator regulations found in 29 CFR 1910.134 or European Standard EN 149. Use a NIOSH/MSHA or European Standard EN 149 approved respirator if exposure limits are exceeded or if irritation or other symptoms are experienced.
Section 9 - PHYSICAL AND CHEMICAL PROPERTIES
Physical State: Liquid
Color: clear, colorless
Odor: None reported.
pH: Not available.
Vapor Pressure: 20 mm Hg @ 20 C
Viscosity: Not available.
Boiling Point: 125 deg C
Freezing/Melting Point: Not available.
Autoignition Temperature: 379 deg C ( 714.20 deg F)
Flash Point: 8 deg C ( 46.40 deg F)
Explosion Limits, lower: 0.8
Explosion Limits, upper: 16.3
Decomposition Temperature: Not available.
Solubility in water: Insoluble in water.
Specific Gravity/Density: 0.77
Molecular Formula: C6H19NSi2
Molecular Weight: 161.3107
Section 10 - STABILITY AND REACTIVITY
Chemical Stability:
Stable under normal temperatures and pressures.
Conditions to Avoid:
Mechanical shock, incompatible materials, ignition sources, temperatures above 150C, exposure to moist air or water.
Incompatibilities with Other Materials:
Strong oxidants and strong acids. May decompose upon exposure to moist air or water. When heated to temperatures above 150 C in the presence of air, hexamethyldisilazane can form formaldehyde vapors.
Hazardous Decomposition Products:
Nitrogen oxides, carbon monoxide, irritating and toxic fumes and gases, carbon dioxide, silicon dioxide, formaldehyde.
Hazardous Polymerization: Has not been reported.
Stable under normal temperatures and pressures.
Conditions to Avoid:
Mechanical shock, incompatible materials, ignition sources, temperatures above 150C, exposure to moist air or water.
Incompatibilities with Other Materials:
Strong oxidants and strong acids. May decompose upon exposure to moist air or water. When heated to temperatures above 150 C in the presence of air, hexamethyldisilazane can form formaldehyde vapors.
Hazardous Decomposition Products:
Nitrogen oxides, carbon monoxide, irritating and toxic fumes and gases, carbon dioxide, silicon dioxide, formaldehyde.
Hazardous Polymerization: Has not been reported.
Section 11 - TOXICOLOGICAL INFORMATION
RTECS#:
CAS# 999-97-3: JM9230000 LD50/LC50:
CAS# 999-97-3: Dermal, guinea pig: LD50 = 1 mL/kg; Draize test, rabbit, skin: 500 uL Severe; Inhalation, mouse: LC50 = 12 gm/m3/2H; Inhalation, rat: LC50 = 8700 mg/m3/4H; Oral, mouse: LD50 = 850 mg/kg; Oral, rabbit: LD50 = 1100 mg/kg; Oral, rat: LD50 = 850 mg/kg; Skin, rabbit: LD50 = 710 uL/kg.
Not available.
Carcinogenicity:
Hexamethyldisilizane - Not listed by ACGIH, IARC, or NTP.
Other:
See actual entry in RTECS for complete information.
CAS# 999-97-3: JM9230000 LD50/LC50:
CAS# 999-97-3: Dermal, guinea pig: LD50 = 1 mL/kg; Draize test, rabbit, skin: 500 uL Severe; Inhalation, mouse: LC50 = 12 gm/m3/2H; Inhalation, rat: LC50 = 8700 mg/m3/4H; Oral, mouse: LD50 = 850 mg/kg; Oral, rabbit: LD50 = 1100 mg/kg; Oral, rat: LD50 = 850 mg/kg; Skin, rabbit: LD50 = 710 uL/kg.
Not available.
Carcinogenicity:
Hexamethyldisilizane - Not listed by ACGIH, IARC, or NTP.
Other:
See actual entry in RTECS for complete information.
Section 12 - ECOLOGICAL INFORMATION
Section 13 - DISPOSAL CONSIDERATIONS
Products which are considered hazardous for supply are classified as Special Waste and the disposal of such chemicals is covered by regulations which may vary according to location. Contact a specialist disposal company or the local waste regulator for advice. Empty containers must be decontaminated before returning for recycling.
Section 14 - TRANSPORT INFORMATION
IATA
Shipping Name: FLAMMABLE LIQUID, CORROSIVE, NOS
Hazard Class: 3
UN Number: 2924
Packing Group: II
IMO
Shipping Name: FLAMMABLE LIQUID, CORROSIVE, NOS
Hazard Class: 3
UN Number: 2924
Packing Group: II
RID/ADR
Shipping Name: FLAMMABLE LIQUID, CORROSIVE, NOS
Hazard Class: 3
UN Number: 2924
Packing group: II
Section 15 - REGULATORY INFORMATION
European/International Regulations
European Labeling in Accordance with EC Directives
Hazard Symbols: XI F
Risk Phrases:
R 11 Highly flammable.
R 36/37/38 Irritating to eyes, respiratory system
and skin.
Safety Phrases:
S 26 In case of contact with eyes, rinse immediately
with plenty of water and seek medical advice.
S 28 After contact with skin, wash immediately
with...
WGK (Water Danger/Protection)
CAS# 999-97-3: 1
Canada
CAS# 999-97-3 is listed on Canadas DSL List.
CAS# 999-97-3 is not listed on Canadas Ingredient Disclosure List.
US FEDERAL
TSCA
CAS# 999-97-3 is listed on the TSCA inventory.
